To provide a vibration-free device which has less restriction related to disposition of component elements for composing the vibration-free device such as a positive actuator, which can be realized by a relatively simple controller (comprising an analogue circuit, for example,) and in which interference of control force has no problems practically, and a control method thereof.
This device comprises a table for mounting a vibration disability device which needs to be free from vibration, plural sensors 15-20 to detect motion of the table, and plural positive actuators 11-14 to control motion of the table. It is provided with an operation control means to conduct conversion of measurements in the sensors 15-20 and control force at the positive actuators 11-14 to control quantity and operation quantity of motion of six freedom degrees of one freedom degree of each of vertical translation and rotation around its axis of the elastically supported vibration disability device or table, and two freedom degrees of each of horizontal translation and rotation around its axis of that based on two-dimensional position relation between the center of elastic support and the sensors and the positive actuators by supposing that the center of elastic support coincides with the center of gravity.
WATANABE KAZUHIDE
KINO YOSHINORI
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