Title:
振動発電素子およびその製造方法
Document Type and Number:
Japanese Patent JP7365996
Kind Code:
B2
Abstract:
A great force is prevented from acting on an elastic support section of a MEMS vibration-driven energy harvesting element. A vibration-driven energy harvesting element has a fixed electrode fixed to a base section, a movable electrode movable relative to the fixed electrode, an elastic support section which has one end connected to the base section and the other end connected to the movable electrode and elastically supports the movable electrode, and at least one of a first member which is fixed to the movable electrode and faces the base section or a member fixed to the base section at a distance in a direction orthogonal to a vibration plane on which the movable electrode vibrates, and a second member which is fixed to the base section and faces the movable electrode or a member fixed to the movable electrode at a distance in a direction orthogonal to the vibration plane.
Inventors:
Noriko Shimomura
Hisayuki Ashizawa
Hisayuki Ashizawa
Application Number:
JP2020209683A
Publication Date:
October 20, 2023
Filing Date:
December 17, 2020
Export Citation:
Assignee:
Saginomiya Co., Ltd.
International Classes:
H02N1/00; B81B3/00; B81C1/00
Domestic Patent References:
| JP2020065326A |
Foreign References:
| WO2011077717A1 |
Attorney, Agent or Firm:
Patent Attorney Tani / Abe Patent Office
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