Title:
VIBRATION DEVICE
Document Type and Number:
Japanese Patent JP2022163199
Kind Code:
A
Abstract:
To enable a multiaxial and concurrent vibration in a frequency region with frequencies of 2 kHz or larger by increasing the rigidity and the motion accuracy of a linear guide.SOLUTION: A vibration device according to an embodiment of the present invention includes: a vibration table: an X-axis vibration unit for vibrating the vibration table in the X-axis direction; and a Y-axis linear guide way for connecting the vibration table and the X-axis vibration unit to each other so that the vibration table and the X-axis vibration unit can slide into a Y-axis direction perpendicular to the X-axis direction, the Y-axis linear guide way having: a Y-axis rail extending into the Y-axis direction; a plurality of rolling bodies capable of rolling on the Y-axis rail; and a Y-axis carriage capable of traveling on the Y-axis rail by the plurality of rolling bodies. The vibration device further includes at least five load paths between the Y-axis carriage and the Y-axis rail where the rolling bodies roll.SELECTED DRAWING: Figure 40
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Inventors:
Shigeru Matsumoto
Hiroshi Miyashita
Kazuhiro Murauchi
Hiroshi Miyashita
Kazuhiro Murauchi
Application Number:
JP2022129783A
Publication Date:
October 25, 2022
Filing Date:
August 17, 2022
Export Citation:
Assignee:
International Measuring Instruments Co., Ltd.
International Classes:
G01M7/06
Domestic Patent References:
| JPH0473421A | 1992-03-09 | |||
| JPH06265438A | 1994-09-22 |
Foreign References:
| WO2009130953A1 | 2009-10-29 | |||
| WO2016017744A1 | 2016-02-04 |
Attorney, Agent or Firm:
Shuhei Matsuoka