VISUAL INSPECTION DEVICE

Japanese Patent JP2022108359

A

To provide a visual inspection device which can quickly perform a desired inspection on each of a portion with a high reflectance ratio and a portion with a low reflectance ratio even if the portion with the high reflectance ratio and the portion with the low reflectance ratio are mixed in an inspection image.SOLUTION: A visual inspection device 1 for inspecting an appearance of an inspection object portion on the basis of a photographed image comprises an inspection image acquisition unit 3, a reference image registration unit 4, and an inspection unit 5. The inspection image acquisition unit acquires at least a first standard inspection image P1 obtained by imaging the appearance of an inspection object portion Rx at the first brightness and a second standard inspection image P2 obtained by imaging the appearance of the inspection object portion at the second brightness as inspection images at once. The reference image registration unit registers a first standard reference image Pf1 corresponding to the first brightness and a second standard reference image Pf2 corresponding to the second brightness as reference images. The inspection unit inspects the first standard inspection image by comparing it with the first standard reference image and inspects the second standard inspection image by comparing it with the second standard reference image.SELECTED DRAWING: Figure 1

WO/1998/038492	INSPECTION SYSTEM
JP2016134412	DEFECT OBSERVATION METHOD AND DEVICE

OKA KOHEI
KODERA HIDEKAZU

JP2021003291A

July 26, 2022

January 13, 2021

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TORAY ENG CO LTD
TASMIT INC

G01N21/956; H01L21/66

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