Title:
WAFER DETECTOR
Document Type and Number:
Japanese Patent JP2001093964
Kind Code:
A
Abstract:
To provide a wafer detector capable of quickly detecting the housed condition of wafers in a wafer carrier in which many wafers are housed.
This wafer detector 100 comprises a light emitter 110, capable of irradiating two or more wafer housings 12 at the same time with light for a wafer carrier 10 having a plurality of wafer housing 12, 12, etc., formed therein, a CCD121 having two or more detectors for detecting an image obtained by the irradiating light which pass through the wafer carrier 10 and an electronic control unit 130 for detecting wafers 11, 11, etc., in the wafer carrier 10, based on signals obtained by the CCD121.
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Inventors:
YOKOTA TORU
Application Number:
JP26740399A
Publication Date:
April 06, 2001
Filing Date:
September 21, 1999
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/67; G01B11/00; H01L21/68; (IPC1-7): H01L21/68; G01B11/00
Attorney, Agent or Firm:
Furuya Fumio (1 person outside)