Title:
ウエハ研削装置及びウエハ製造方法
Document Type and Number:
Japanese Patent JP6427320
Kind Code:
B2
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Inventors:
Shinichi Kishita
Application Number:
JP2014011978A
Publication Date:
November 21, 2018
Filing Date:
January 27, 2014
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
H01L21/304; B24B9/00; H01L21/02
Domestic Patent References:
| JP2008093488A1 | ||||
| JP10256106A | ||||
| JP2000084811A | ||||
| JP2005072027A | ||||
| JP2001087996A | ||||
| JP2000084810A | ||||
| JP2009255214A | ||||
| JP2011003773A |
Attorney, Agent or Firm:
Yoshinobu Kanayama