Title:
ウエハレベルCSP
Document Type and Number:
Japanese Patent JP4921645
Kind Code:
B2
Inventors:
Noriyuki Kimura
Application Number:
JP2001057277A
Publication Date:
April 25, 2012
Filing Date:
March 01, 2001
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
H01L23/12; H01L23/522; H01L21/304; H01L21/306; H01L21/312; H01L21/56; H01L21/60; H01L21/768
Domestic Patent References:
JP10135270A | ||||
JP2002198463A | ||||
JP2000195987A |
Attorney, Agent or Firm:
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura
Noriaki Uchino
Nobuyuki Kimura