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Title:
WASHING DEVICE AND WASHING METHOD
Document Type and Number:
Japanese Patent JP3286539
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To make it possible to select and switch OH- ionized water or H+ ionized water right after formation and to spray the water on the surface of a substrate to be washed by providing a washing liquid spray means itself with an electrolytic ion generating function radically activating a pure water or forming the ion.
SOLUTION: The positive pole of a direct current power source is connected to an inside electrode 23 stuck to a H+ ion exchange membrane 19 on the inside treating chamber 201 side and a negative pole is connected to an outside electrode 29 on the outside treating chamber 202 side in such a state that pure water is introduced into the inside treating chamber 201 and the outside treating chamber 202. When a prescribed voltage and current are applied to the electrodes 23 and 29, an electrolytic reaction is caused at the positive electrode 23 and H+ ion is generated. The liq. rich in H+ ion is passed through a nozzle part 5 from the inside treating chamber 201. and sprayed from a lower end circular outlet 4. When the negative pole is connected to the inside electrode 23 and the positive pole is connected to the outside electrode 29 by switching a connecting state and the prescribed voltage and current are applied, the electrolytic reaction is caused at the negative electrode 23 and the OH- ion is generated in the inside treating chamber 201 and sprayed.


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Inventors:
Shigeyoshi Netsu
Yasuyuki Harada
Kazuhiko Shiba
Application Number:
JP28848196A
Publication Date:
May 27, 2002
Filing Date:
October 30, 1996
Export Citation:
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Assignee:
Shin-Etsu Semiconductor Co., Ltd.
Pretec Co., Ltd.
International Classes:
B08B3/02; B08B3/08; B08B3/10; B08B3/12; C02F1/46; G11B23/50; H01L21/00; H01L21/306; (IPC1-7): B08B3/02; B08B3/08; B08B3/12; C02F1/46
Domestic Patent References:
JP7234227A
Attorney, Agent or Firm:
Takehiko Suzue (5 outside)



 
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