Title:
WASHING DEVICE
Document Type and Number:
Japanese Patent JPH05190519
Kind Code:
A
Abstract:
PURPOSE: To provide an inline single wafer washing device with which the material to be washed can be conveyed in a stable manner against variation of temperature and having an excellent assembling and maintenance workability.
CONSTITUTION: The conveying and driving system of a washing vessel 9 and the material to be washed 13 is separated, and they are connected common by a plane member 33. As a result, a work can be conveyed in a stable manner in spite of thermal variation of washing fluid.
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Inventors:
HONMA YOSHIFUMI
FUJIKURA SEIJI
FUJIKURA SEIJI
Application Number:
JP4642192A
Publication Date:
July 30, 1993
Filing Date:
January 17, 1992
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B08B1/02; B08B3/04; B65G49/06; H01L21/304; H01L21/677; H01L21/68; (IPC1-7): B08B1/02; B08B3/04; B65G49/06; H01L21/304; H01L21/68
Domestic Patent References:
| JP49070332B | ||||
| JPS5635794B1 | 1981-08-19 |
Attorney, Agent or Firm:
Akio Takahashi (1 person outside)