To propose a washing method and device by which from a material to be washed that has finished washing with a cleaning agent, the cleaning agent and soil are effectively removed, a decrease in purity of rinse liquid is prevented to perform immersion rinse and vapor washing, and restocking of the soil is prevented to increase washing effect.

A material to be washed 3 is introduced into a washing tank 1 to wash it with a cleaning agent. The material to be washed 3 that has been washed with the cleaning agent is transferred to a first vapor washing part 9 of a finish tank 2 and is vapor washed with solvent vapor to remove most of the cleaning agent and soil stuck on the material to be washed 3. Then, the material to be washed is transferred to a rinse part 8 and is immersed in and rinsed with rinse liquid 12. The material to be washed 3 after the immersion rinse is transferred to a second vapor washing part 10 to vapor wash it with vapor of the liquid. In this washing method, liquid condensate generated in the first vapor washing process is prevented from being incorporated in the rinse liquid.