To obtain stably and efficiently a wire bond of good quality by correcting a posture of a capillary so that the capillary contacts with a bonding surface vertically.
An angle detecting means 2 irradiates a bonding portion with light, images its image of reflected light by a CCD(computer-controlled display) camera 24, and detects the shape of a strike mark of the capillary by a control circuit 26 based on the imaged information. Then, based on the detected strike-mark of the capillary, an inclined angle θ between an imaginary surface vertical to the capillary and the bonding surface is detected. According to the result of the angle detection, in a body portion 3, the posture of the capillary 31 is corrected so that the capillary 31 always contacts with the bonding surface in a vertical direction.
Takaaki Yasumura
Takeshi Oshio
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