Title:
ワイヤソー装置
Document Type and Number:
Japanese Patent JP6430178
Kind Code:
B2
Inventors:
Synune, Youssef
Borne, Frederick
Subiere, Sebastian
John Spirer
Borne, Frederick
Subiere, Sebastian
John Spirer
Application Number:
JP2014172197A
Publication Date:
November 28, 2018
Filing Date:
August 27, 2014
Export Citation:
Assignee:
Toyo Advanced Technologies Co., Ltd.
International Classes:
H01L21/304; B23D57/02; B24B27/06; B28D5/04
Domestic Patent References:
| JP2012250328A | ||||
| JP2232156A | ||||
| JP2007030117A |
Foreign References:
| DE3532717A |
Attorney, Agent or Firm:
Maeda patent office