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Patent Searching and Data


Title:
WIRE SAW
Document Type and Number:
Japanese Patent JP2000108012
Kind Code:
A
Abstract:

To provide a wire saw for maintaining the orthogonal abutting state of a wire to respective rollers as much as possible, and moreover facilitating the winding of the wire even increasing a working pitch.

A wire W is made travelable orthogonally to working rollers between the rollers 3a and 3b, and orthogonally to guide rollers between the rollers 4a and 4b, and the wire W traveling between the rollers 4a and 4b is made tiltedly travelable so as to be slipped by one pitch Pw part of wire guide grooves 5 provided on the rollers 3a and 3b from the wire W traveling between the rollers 3a and 3b.


Inventors:
SASABE KENICHI
Application Number:
JP28172598A
Publication Date:
April 18, 2000
Filing Date:
October 02, 1998
Export Citation:
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Assignee:
EBARA CORP
International Classes:
B24B27/06; H01L21/301; H01L21/304; (IPC1-7): B24B27/06; H01L21/301; H01L21/304
Attorney, Agent or Firm:
Isamu Watanabe (2 outside)