位置補正機能を有する作業装置および作業方法

Japanese Patent JP6078298

B2

[Problem] To provide a work device having a position correction function that can solve the problem of positioning accuracy of a drive device. [Solution] A work device provided with a stage, a work head device, an image pick-up device, a drive device that causes the work head device and the stage to move relatively in the XYZ directions, and a control device that measures the displacement amount of the work head device, wherein a linear motion device is provided to which is attached the image pick-up device and the work head device and which can move back and forth between a first position and a second position in the X direction or the Y direction; the linear motion device is attached to the drive device so that the linear motion device can be moved back and forth by the drive device in the same direction as the back and forth motion of the linear motion device; and a control device calculates the positional displacement amount of the drive device on the basis of the difference between positional displacement amounts (X1, Y1) obtained by performing image processing on a first correction-use image captured by the image pick-up device when the linear motion device is at the first position, and positional displacement amounts (X2, Y2) obtained by　performing image processing on a second correction-use image captured by the image pick-up device when the linear motion device is at the second position.

Kazumasa Ikushima

JP2012241792A

February 08, 2017

November 01, 2012

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Musashi Engineering Co., Ltd.

G01B11/00; B05C5/00; B05C11/00; B05D1/26; B05D3/00

JP10012642A
JP2012148235A
JP2010131488A
JP2003001170A
JP2007061734A
JP2007178367A
JP2001176897A

US20070000442

Asako Sudo
Akinobu Sudo

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