PURPOSE: To execute rapid measurement and inspection of all lots to which a trouble detected during a manufacturing process is estimated to occur and to perform immediate variation of a working indication.

CONSTITUTION: By combining together inspection data 1 of a lot collected at a measuring and inspecting process and manufacturing work data 2 collected when the lot is in a manufacturing process, inspection results are classified by a manufacturing work detail by means of a statistical processing part 3 to numerically decide the inspecting result. The inspecting result is decided according to specification data 11 by a detecting part 4 and when a deciding result is unacceptable, a trouble manufacturing work key 5 to pick up a manufacturing work detail to which a detecting trouble is related is outputted. A pick-up part 6 picks up information on all lots, to which a trouble detected by a detecting part 4 is related, from the manufacturing work data 2 by means of a trouble manufacturing work key 5, and outputted as a priority indication lot list 7. A sequence control part 9 rewrites the details of a work waiting list 8 of each process followed by a manufacturing process and preceded by measurement and inspection by means of the priority indication lot list 7 and outputs a rewriting result as a working indication 10.