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Title:
WORKPIECE POLISHING DEVICE AND ITS DRIVER
Document Type and Number:
Japanese Patent JPH0847855
Kind Code:
A
Abstract:

PURPOSE: To provide a polishing machine with a low cross section or contour for increasing rigidity and control and dimension setting precision during lapping work.

CONSTITUTION: Carriage means 18 are reciprocatingly moved perpendicular to a lower lap plate 14 in frame means for polishing work and are accessible for filling or removing workpieces. An upper lap plate 12 is reciprocatingly moved independently from the carriage means and perpendicular to the carriage means for polishing work. A polishing machine 10 is provided with a temperature controller having a pipe for a cooling liquid stream arranged adjacent to the lower lap plate 14. The temperature controller has means for more uniformly control the temperature of the whole lap plate. The polishing machine is provided with a polishing fluid distributor device 126 concentrically mounted above the upper lap plate and having a plurality ring troughs spaced from one another in the radial direction for uniformly supplying polishing fluid to a lap plane.


Inventors:
JIYOSEFU BUI SESUNA
ROORENSU OO DEI
Application Number:
JP7000795A
Publication Date:
February 20, 1996
Filing Date:
March 28, 1995
Export Citation:
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Assignee:
SPEEDFAM CORP
International Classes:
B24B7/22; B24B27/00; B24B37/015; B24B37/08; B24B37/10; B24B41/02; B24B49/14; B24B57/02; (IPC1-7): B24B37/04
Attorney, Agent or Firm:
Kyozo Yuasa (5 people outside)



 
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