To nondestructively analyze elements in a very small space inside samples.
A primary X-ray source 1 for generating X-rays for excitation is connected to a conduit 5 for X-ray detection by an X-ray irradiation mechanism. An X-ray detector 9 is coupled with a base end part of the conduit 5 for X-ray detection so that fluorescent X-rays discharged from a sample 7 may be passed through an internal passage 4 from an opening at a tip part and guided to the X-ray detector 9. The inside of the conduit 5 for X-ray detection is provided with a secondary target 3 for receiving a primary X-ray beam incident via a conduit 2a for X-ray incidence, generating a secondary X-ray beam, and irradiating it to the sample via the tip part of the conduit 5 for X-ray detection. Since the secondary target 3 is formed in a ring shape and provided for the inside of the conduit 5 for X-ray detection and in an outer circumference of the internal passage 4 in the conduit 5 and has an inclined plane in its tip part, it is possible to efficiently irradiate the secondary X-ray beam in the direction of the sample.
MATSUDA AKINORI
TSUTSUMIMOTO KAORU
| JP2005512288A | 2005-04-28 | |||
| JP2004093405A | 2004-03-25 | |||
| JP2001201467A | 2001-07-27 | |||
| JP2001201468A | 2001-07-27 | |||
| JP2003207466A | 2003-07-25 | |||
| JP2005512288A | 2005-04-28 | |||
| JP2004093405A | 2004-03-25 |
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