Title:
X-RAY ANALYZER
Document Type and Number:
Japanese Patent JP2002168813
Kind Code:
A
Abstract:
To provide an X-ray analyzer that enables the analysis of trace elements in a shorter time.
A plurality of superconductive radiation detectors 6A, 6B... and 6N are arranged and provided respectively with signal processing circuits 7A, 7B... and 7N and multichannel analyzers 8A, 8B... and 8N. Outputs of the multichannel analyzers are added up with an adder 12 and X ray spectrums are displayed based on an output of the adder.
Inventors:
KAWABE KAZUYASU
Application Number:
JP2000365412A
Publication Date:
June 14, 2002
Filing Date:
November 30, 2000
Export Citation:
Assignee:
JEOL LTD
International Classes:
G01N23/225; G01T1/36; G21K5/04; (IPC1-7): G01N23/225; G01T1/36; G21K5/04