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Patent Searching and Data


Title:
X-RAY FILTER
Document Type and Number:
Japanese Patent JPH09297198
Kind Code:
A
Abstract:

To provide an X-ray filter that can prevent the rupture of an X-ray transmission aperture of a member provided with the X-ray transmission aperture to which converging X-rays are radiated.

An X-ray filter is arranged on the X-ray radiation side of a member 32 provided with an X-ray transmission aperture to which converging X-rays are radiated, in a state of being isolated from the member 32. This X-ray filter is provided with an X-ray transmission film of the same material as the X-ray transmission aperture of the member 32 or an X-ray transmission film with an X-ray absorbing characteristic equal or approximate to the X-ray transmission aperture of the member 32, and arranged in a position where the X-rays are radiated at a lower convergence degree than the X-rays radiated to the X-ray transmission aperture of the member 32.


Inventors:
FUJISAKI HISAO
TAKAHASHI SHINICHI
Application Number:
JP11391196A
Publication Date:
November 18, 1997
Filing Date:
May 08, 1996
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G21K3/00; G21K7/00; (IPC1-7): G21K3/00; G21K7/00