Title:
本発明の非平行形状フィールドを有するX線源
Document Type and Number:
Japanese Patent JP5519587
Kind Code:
B2
Abstract:
An improved electron bombardment device includes a first tubular member for containing a target material and a second tubular member surrounding the first tubular member, leaving a space between the first and second tubular members. In an embodiment of the invention, the second tubular member is an electron emitting material, and the bombardment device includes a voltage application means for accelerating emitted electrons from the second tubular member towards the first tubular member. In a further embodiment of the invention, the second tubular member comprises a thermionic electron emitting material. In an alternative embodiment, the second tubular member comprises a field electron emitting material.
Inventors:
Resiak, Stanley
Busta, Heinz
Zwicker, Bruce
Busta, Heinz
Zwicker, Bruce
Application Number:
JP2011144599A
Publication Date:
June 11, 2014
Filing Date:
June 29, 2011
Export Citation:
Assignee:
CABOT MICROELECTRONICS CORPORATION
International Classes:
H01J35/02; G21K1/00; G21K1/02; G21K5/02; H01J35/04; H01J35/06; H01J35/08; H01J35/16; H05G1/00
Domestic Patent References:
| JP2002298772A | ||||
| JP2000277041A | ||||
| JP60232650A | ||||
| JP60147150U |
Foreign References:
| WO2005117058A1 | ||||
| US5014289 |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Koichi Itsubo
Tomohiro Minamiyama
Jun Tsuruta
Koichi Itsubo
Tomohiro Minamiyama
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