Title:
A career stand in which the crookedness for removing a career board is possible, a device, and a method
Document Type and Number:
Japanese Patent JP6234363
Kind Code:
B2
Abstract:
A flexible carrier mount for mounting of a carrier substrate when the carrier substrate is detached from a product substrate, detachment means being provided for debonding the product substrate with bending of the carrier substrate. A device for detaching a carrier substrate from one product substrate in one detachment direction having: a carrier mount flexible in the detachment direction for mounting the carrier substrate, a substrate mount for mounting the product substrate, and detachment means for debonding the carrier substrate from the product substrate with bending of the carrier substrate. A method for detaching a carrier substrate from a product substrate in one detachment direction with the steps: mounting the product substrate with a substrate mount and mounting the carrier substrate with a carrier mount flexible in the detachment direction and debonding the carrier substrate from the product substrate with bending of the carrier substrate.
Inventors:
Jürgen Burggraaf
Daniel Burgstaller
Daniel Burgstaller
Application Number:
JP2014504171A
Publication Date:
November 22, 2017
Filing Date:
April 11, 2011
Export Citation:
Assignee:
Afau Group A Tarner Gamebehr
International Classes:
H01L21/683
Domestic Patent References:
| JP20124522A |
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Junichi Maekawa
Hiroyasu Ninomiya
Ueshima
Junichi Maekawa
Hiroyasu Ninomiya
Ueshima
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