Title:
切削装置
Document Type and Number:
Japanese Patent JP7479764
Kind Code:
B2
Abstract:
An object of the present invention is to provide a cutting device having a novel sensor unit that can specify the positions of canisters. The present invention provides the cutting device comprising: a storage unit that has a rotary table and a plurality of containers arranged along the circumferential direction of the rotary table; a rotary drive unit that is connected with the lower part of the rotary table and can rotate the rotary table around a predetermined rotary shaft by every predetermined angle; a plate member that is connected around the rotary shaft below the rotary table and has optical features for specifying the containers located above each area in the areas corresponding to the containers; a photosensor unit that is arranged on a part of the outer peripheral part of the plate member and has one or more photosensors that, every time the plate member rotates at the predetermined angle, can detect the optical feature corresponding to one container; and a position specification unit that, based on a signal from the photosensor unit, specifies at least the position of one container corresponding to the optical feature.
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Inventors:
Masayuki Takahashi
Application Number:
JP2020134818A
Publication Date:
May 09, 2024
Filing Date:
August 07, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B41/06; B24B49/12
Domestic Patent References:
| JP2000238884A | ||||
| JP2004207424A | ||||
| JP2017112216A | ||||
| JP3200012A | ||||
| JP2004347382A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano