フォトマスクの欠陥修正方法

Title:

フォトマスクの欠陥修正方法

Document Type and Number:

Japanese Patent JP2658231

Kind Code:

B2

Inventors:

MATSUDA SHUICHI
ONODA HIROSHI
MORIMOTO HIROAKI

Application Number:

JP19687388A

Publication Date:

September 30, 1997

Filing Date:

August 06, 1988

Export Citation:

Assignee:

MITSUBISHI DENKI KK

International Classes:

G03F1/72; G03F1/74; H01L21/027; H01L21/30; (IPC1-7): G03F1/08; H01L21/027

Attorney, Agent or Firm:

宮田金雄（外３名）

Previous Patent: ＩＣカード

Next Patent: Ｎ進カウンタ