Title:
4方弁を有する半導体素子の製造装置、半導体素子の製造装置の弁制御方法及びそれを用いた半導体素子の製造方法
Document Type and Number:
Japanese Patent JP5473184
Kind Code:
B2
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Inventors:
Moto Akitoshi
Liu Yong Min
Kinbuchi
Kim Yong
Big swing
Kim Yu Hong
Liu Yong Min
Kinbuchi
Kim Yong
Big swing
Kim Yu Hong
Application Number:
JP2006010304A
Publication Date:
April 16, 2014
Filing Date:
January 18, 2006
Export Citation:
Assignee:
Samsung Electronics Co.,Ltd.
International Classes:
H01L21/31; C23C16/455
Domestic Patent References:
| JP5047665A | ||||
| JP7000175B2 | ||||
| JP2002095955A | ||||
| JP4302138A | ||||
| JP3023625A | ||||
| JP61195043U | ||||
| JP6147329A | ||||
| JP4361531A | ||||
| JP6163425A | ||||
| JP4078388A | ||||
| JP3062921A | ||||
| JP2021618A | ||||
| JP1220821A |
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro
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