Title:
An electric electromechanical conversion element, a manufacturing method for the same, a drop discharge head, and a droplet discharging unit
Document Type and Number:
Japanese Patent JP6028419
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electromechanical conversion element, and so on capable of preventing a resistance value of a first electrode (lower electrode)from being increased.SOLUTION: The electromechanical conversion element comprises a first electrode including a first layer and a second layer formed on a periphery of a predetermined region on the first layer, an electromechanical conversion film formed on the predetermined region so as to be projected from the second layer, and a second electrode formed on the electromechanical conversion film. The second layer has the same layer composition as the second electrode.
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Inventors:
Takeuchi Atsushi
Masaru Makai
Osamu Machida
Shimofuku Hikari
Masaru Makai
Osamu Machida
Shimofuku Hikari
Application Number:
JP2012147704A
Publication Date:
November 16, 2016
Filing Date:
June 29, 2012
Export Citation:
Assignee:
株式会社リコー
International Classes:
H01L41/047; H01L41/09; H01L41/29; H01L41/331
Domestic Patent References:
| JP2012061703A | ||||
| JP2012119386A | ||||
| JP2007073598A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito