Title:
An etching solution constituent and an etching method
Document Type and Number:
Japanese Patent JP6180298
Kind Code:
B2
Inventors:
Ishizaki Hayao
Application Number:
JP2013244923A
Publication Date:
August 16, 2017
Filing Date:
November 27, 2013
Export Citation:
Assignee:
ADEKA CORPORATION
International Classes:
C23F1/18; C23F1/26; H01L21/308
Domestic Patent References:
| JP2008288575A | ||||
| JP2009019270A |
Foreign References:
| WO2011093445A1 |
Attorney, Agent or Firm:
Michiharu Soga
Kajinami order
Kazuhiro Oyaku
Satoshi Iino
Kajinami order
Kazuhiro Oyaku
Satoshi Iino
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