Title:
An exposure device, an exposure method, and a device manufacturing method
Document Type and Number:
Japanese Patent JP6229766
Kind Code:
B2
Abstract:
A part of a plate (50) of a predetermined shape detachably mounted on a moving body (WST) is detected by an alignment system (ALG) while the position of the moving body is measured by a measurement unit (18 or the like) that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate (50) is obtained. Therefore, even if there are no alignment marks (fiducial marks) on the moving body (WST) for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.
Inventors:
Masahiko Yasuda
Taro Sugihara
Taro Sugihara
Application Number:
JP2016123789A
Publication Date:
November 15, 2017
Filing Date:
June 22, 2016
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G01B11/00; H01L21/027; H01L21/68
Domestic Patent References:
| JP2004207696A | ||||
| JP2004165666A | ||||
| JP11135400A | ||||
| JP2004311897A | ||||
| JP2004207711A | ||||
| JP2007528115A | ||||
| JP2000077314A |
Foreign References:
| WO2004090577A2 | ||||
| WO2004053955A1 | ||||
| WO2004066371A1 | ||||
| WO2003065427A1 | ||||
| WO2004059710A1 |
Attorney, Agent or Firm:
Atsushi Tateishi