Title:
GAS PURGE UNIT AND GAS PURGE DEVICE
Document Type and Number:
Japanese Patent JP2016127101
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a gas purge unit and a gas purge device capable of performing gas replacement uniformly in a purge object container.SOLUTION: A gas purge unit 20 introduces a purification gas into a purge object container 2 having an opening 2b, through the opening 2b. The gas purge unit 20 has a side nozzle member 22 blowing the purification gas from the side of the opening 2b toward the inside of the purge object container 2. A side nozzle port 26 is formed in the side nozzle member 22, and following relationship is satisfied Ln>Ci, where Ln is the length of a nozzle port non-existing region An where the side nozzle port 26 is not formed along the side of the opening 2b, and Ci is the distance between wafers 1 arranged in the container 2.SELECTED DRAWING: Figure 3D
Inventors:
IWAMOTO TADAMASA
EMOTO ATSUSHI
EMOTO ATSUSHI
Application Number:
JP2014265851A
Publication Date:
July 11, 2016
Filing Date:
December 26, 2014
Export Citation:
Assignee:
TDK CORP
International Classes:
H01L21/677
Domestic Patent References:
| JP2013161924A | 2013-08-19 | |||
| JP2008135791A | 2008-06-12 | |||
| JP2014207306A | 2014-10-30 |
Attorney, Agent or Firm:
Maeda/Suzuki International Patent Corporation