Title:
GAS PURGE UNIT AND GAS PURGE DEVICE
Document Type and Number:
Japanese Patent JP2016127103
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a gas purge unit and a gas purge device capable of performing uniform gas replacement in a container, without obstructing the movement of a robot arm.SOLUTION: A gas purge unit 20 introduces a purification gas into a purge object container 2 having an opening 2b through the opening 2b. The gas purge unit 20 has a top nozzle member 22a in which a top nozzle port 26a for blowing the purification gas from the top part 13b of an opening 13 toward the inside of the container 2 is formed, and a bottom nozzle member 22b in which a bottom nozzle port 26b for blowing the purification gas from the bottom part 13c of the opening 13 toward inside of the container 2 is formed.SELECTED DRAWING: Figure 3D
Inventors:
IWAMOTO TADAMASA
Application Number:
JP2014265863A
Publication Date:
July 11, 2016
Filing Date:
December 26, 2014
Export Citation:
Assignee:
TDK CORP
International Classes:
H01L21/677
Domestic Patent References:
| JP2008135791A | 2008-06-12 | |||
| JP2013161924A | 2013-08-19 | |||
| JP2014038888A | 2014-02-27 | |||
| JP2003045933A | 2003-02-14 | |||
| JP2004260172A | 2004-09-16 | |||
| JP2012094822A | 2012-05-17 | |||
| JP2004235516A | 2004-08-19 |
Foreign References:
| WO2014046476A1 | 2014-03-27 |
Attorney, Agent or Firm:
Maeda/Suzuki International Patent Corporation