Title:
【発明の名称】モノリシック多層圧電アクチュエータの製造方法
Document Type and Number:
Japanese Patent JP3150708
Kind Code:
B2
Abstract:
A method for manufacturing a monolithic piezoelectric actuator of multilayer design and having a high aspect ratio of more than two built up from a plurality of smaller stacks in a multilayer design, includes alternately layering green piezoceramic films and electrode material, compressing the layers while elevating the temperature to remove the binder and thereby form a composite, stacking several of the composites on one another, and sintering the stack so as to form the monolithic piezoelectric actuator which exhibits an improved mechanical strength with good piezoelectric properties.
Inventors:
Dieter Clammer
Hans Hellebrandt
Karl Lubitz
Hans Hellebrandt
Karl Lubitz
Application Number:
JP53756597A
Publication Date:
March 26, 2001
Filing Date:
April 03, 1997
Export Citation:
Assignee:
Siemens Aktiengesellschaft
International Classes:
H01L41/083; H01L41/273; (IPC1-7): H01L41/083
Domestic Patent References:
| JP6351615A | ||||
| JP63288074A | ||||
| JP4264784A |
Attorney, Agent or Firm:
Toshio Yano (3 outside)