Title:
A handler and an inspection device
Document Type and Number:
Japanese Patent JP6040530
Kind Code:
B2
Abstract:
A handler includes a supporting section, a holding section configured to hold an IC chip, and a position changing section between the supporting section and the holding section and configured to change the position of the IC chip held by the holding section. The position changing section includes a two-dimensional moving section that is movable in a predetermined direction, a pivoting section that is pivotable with respect to the two-dimensional moving section, and a piezoelectric actuator configured to move the two-dimensional moving section with respect to the supporting section.
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Inventors:
Masakuni Shiozawa
Osamu Miyazawa
Yoshimura Nishimura
Osamu Miyazawa
Yoshimura Nishimura
Application Number:
JP2012007468A
Publication Date:
December 07, 2016
Filing Date:
January 17, 2012
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01R31/26; G01R31/28
Domestic Patent References:
| JP2006351741A | ||||
| JP2010101776A | ||||
| JP2111271A | ||||
| JP2011048020A | ||||
| JP2009130955A | ||||
| JP2003164174A | ||||
| JP5119838A | ||||
| JP2004228454A | ||||
| JP11271480A |
Foreign References:
| US5550483 |
Attorney, Agent or Firm:
Tatsuya Masuda