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Title:
The hardenability constituent for optical imprints, a pattern formation method, a pattern, and a fluorine-containing compound
Document Type and Number:
Japanese Patent JP6139448
Kind Code:
B2
Abstract:
Provided are a curable composition for optical imprinting, which exhibits excellent mold release properties and ink jet discharge precision, a method for forming a pattern, a pattern, and a fluorine-containing compound. The curable composition for optical imprinting contains a polymerizable compound, a photopolymerization initiator and a fluorine-containing compound. The fluorine-containing compound is represented by general formula (I) or general formula (II). In general formulae (I) and (II), Rf1 to Rf3 are each independently a fluoroalkyl group having 1-9 carbon atoms and having 2 or more fluorine atoms; R is an alkyl group having 1-8 carbon atoms, an alkenyl group having 2-8 carbon atoms or an aryl group having 6-8 carbon atoms; l1 to l3 are each independently a number between 0 and 10, m is an integer between 2 and 4, and n1 and n2 are each independently a number between 1 and 25.

Inventors:
Hirotaka Kitagawa
Yuichiro Goto
Application Number:
JP2014063488A
Publication Date:
May 31, 2017
Filing Date:
March 26, 2014
Export Citation:
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Assignee:
FUJIFILM Corporation
International Classes:
H01L21/027; B29C59/02; C08F2/44
Domestic Patent References:
JP2010239121A
JP2014082469A
JP2014192377A
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes