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Title:
熱交換システム
Document Type and Number:
Japanese Patent JP7404354
Kind Code:
B2
Abstract:
A heat exchange system is arranged between a chiller device and a temperature control member, and is provided with: supply line for supplying a refrigerant from the chiller device to the temperature control member; a return line for returning the refrigerant from the temperature control member to the chiller device; a bypass line for bypassing the supply line and the return line; a latent heat storage member arranged closer to the chiller device relative to a first connection point connecting the return line and the bypass line; and a flow distribution unit that is arranged at a second connection point connecting the outgoing line and the bypass line, and that is for adjusting a ratio for distributing refrigerant to the temperature control member and the bypass line.

Inventors:
Akihiro Ito
Takahiro Minamitani
Shinichi Nitta
Application Number:
JP2021515878A
Publication Date:
December 25, 2023
Filing Date:
March 19, 2020
Export Citation:
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Assignee:
CKD Corporation
International Classes:
F28D20/02; F25B1/00; G05D23/00; H01L21/3065
Domestic Patent References:
JP2006038266A
JP2019009433A
JP2014063972A
JP2011501429A
Foreign References:
KR101936425B1
Attorney, Agent or Firm:
Patent Attorney Corporation Cosmos International Patent and Trademark Office