Title:
Image storage method and scanning microscope
Document Type and Number:
Japanese Patent JP6333462
Kind Code:
B2
Abstract:
A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps:
- Directing a beam of radiation from a source through an illuminator so as to irradiate a surface S of the specimen;
- Using a detector to detect a flux of radiation emanating from the specimen in response to said irradiation;
- Causing said beam to follow a scan path relative to said surface;
- For each of a set of sample points in said scan path, recording an output D n of the detector as a function of a value P n of a selected measurement parameter P, thus compiling a measurement set M = {(D n , P n )}, where n is a member of an integer sequence;
- Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it so as to produce reconstructed imagery of the specimen, wherein, considered at a given point p i within the specimen, the method comprises the following steps:
- In a first probing session, employing a first beam configuration B 1 to irradiate the point p i with an associated first Point Spread Function F 1 , whereby said beam configuration is different to said measurement parameter;
- In at least a second probing session, employing a second beam configuration B 2 to irradiate the point p i with an associated second Point Spread Function F 2 , whereby:
ª F 2 overlaps partially with F 1 in a common overlap zone O i in which point p i is located;
ª F 1 and F 2 have respective non-overlapping zones F 1 ' and F 2 ' outside of O i ,
- Using a Source Separation algorithm in said computer processing apparatus to perform image reconstruction in said overlap zone O i considered separately from said non-overlapping zones F 1 ' and F 2 '.
Inventors:
Pavel Potsek
Faisal Bowkholbell
Belend Helmersrich
Matthias Langhorst
Faisal Bowkholbell
Belend Helmersrich
Matthias Langhorst
Application Number:
JP2017232132A
Publication Date:
May 30, 2018
Filing Date:
December 01, 2017
Export Citation:
Assignee:
FEI COMPANY
International Classes:
H01J37/22; H01J37/28
Domestic Patent References:
| JP2014501915A | ||||
| JP2011233523A | ||||
| JP2013219031A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki
Tadahiko Ito
Shinsuke Onuki
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