Title:
An imprint device and a manufacturing method of an article
Document Type and Number:
Japanese Patent JP5909210
Kind Code:
B2
Abstract:
The present invention provides an imprint apparatus which forms a pattern on an imprint material on a substrate by using a mold, including a first optical member interposed between an illumination optical system and a detection optical system, and a mold, and configured to guide a first light from the illumination optical system and a second light from the detection optical system to the mold, and a second optical member interposed between the first optical member and the detection optical system, and configured to transmit the second light which is reflected by a mark formed on the mold or a mark formed on the substrate and travels toward the detection optical system through the first optical member, and block the first light which travels toward the detection optical system through the first optical member.
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Inventors:
Kenichiro Shinoda
Application Number:
JP2013145841A
Publication Date:
April 26, 2016
Filing Date:
July 11, 2013
Export Citation:
Assignee:
Canon Inc
International Classes:
B29C59/02; H01L21/027; G03F9/00
Domestic Patent References:
| JP2012243863A | ||||
| JP53061279A | ||||
| JP3075529U | ||||
| JP2012238674A |
Foreign References:
| US20120292801 | ||||
| US20080026305 | ||||
| US20070242272 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu