An inspection method of a contact probe, an inspection device

Title:

An inspection method of a contact probe, an inspection device

Document Type and Number:

Japanese Patent JP5962566

Kind Code:

B2

Inventors:

Takaya Noguchi
Norihiro Takesako

Application Number:

JP2013076924A

Publication Date:

August 03, 2016

Filing Date:

April 02, 2013

Export Citation:

Assignee:

Mitsubishi Electric Corporation

International Classes:

H01L21/66; G01R1/06; G01R31/28; G01R35/00

Domestic Patent References:

JP10221365A
JP2005345171A

Attorney, Agent or Firm:

Mamoru Takada
Hideki Takahashi
Yoshimi Kuno

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