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Title:
ＺｎＯ系半導体装置の製造方法
Document Type and Number:
Japanese Patent JP5399640
Kind Code:
B2
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Inventors:
Akio Ogawa
Michihiro Sano
Hiroyuki Kato
Taiji Kotani
Tomofumi Yamamuro
Application Number:
JP2008056090A
Publication Date:
January 29, 2014
Filing Date:
March 06, 2008
Export Citation:
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Assignee:
Stanley Electric Co., Ltd.
International Classes:
H01L33/26; B82Y20/00; H01L33/06; H01L33/28; H01S5/347
Attorney, Agent or Firm:
Takahashi Takashi 4 郎
Mikio Kiyama



 
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