Title:
A manufacturing method of an antireflection film
Document Type and Number:
Japanese Patent JP5940662
Kind Code:
B2
Inventors:
Nobuaki Yamada
Akiyoshi Fujii
Akiyoshi Fujii
Application Number:
JP2014521417A
Publication Date:
June 29, 2016
Filing Date:
June 14, 2013
Export Citation:
Assignee:
Sharp Corporation
International Classes:
G02B1/118; B29C59/02
Domestic Patent References:
| JP2008132543A | ||||
| JP2009294651A | ||||
| JP2011168003A |
Foreign References:
| WO2006059686A1 |
Attorney, Agent or Firm:
Atomi International Patent Office