Title:
A manufacturing method of the compound board provided with the nitride semiconductor thin film
Document Type and Number:
Japanese Patent JP6049571
Kind Code:
B2
Inventors:
Shigeru Konishi
Application Number:
JP2013176784A
Publication Date:
December 21, 2016
Filing Date:
August 28, 2013
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
H01L21/02; H01L27/12
Domestic Patent References:
| JP2010232625A | ||||
| JP2010180081A | ||||
| JP2009231506A | ||||
| JP2006210660A |
Attorney, Agent or Firm:
Shoichi Okuyama
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Ayako Nakamura
Satoshi Morimoto
Kyoko Tsunoda
Yu Tanaka
Tokumoto Koichi
Atsushi Watanabe
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Ayako Nakamura
Satoshi Morimoto
Kyoko Tsunoda
Yu Tanaka
Tokumoto Koichi
Atsushi Watanabe