Title:
A manufacturing method of a corpuscular beam transmission window
Document Type and Number:
Japanese Patent JP5910290
Kind Code:
B2
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Inventors:
Doi Makoto
Application Number:
JP2012101796A
Publication Date:
April 27, 2016
Filing Date:
April 26, 2012
Export Citation:
Assignee:
JFE Engineering Corporation
International Classes:
G21K5/00
Domestic Patent References:
| JP6102400A | ||||
| JP9010963A | ||||
| JP2006120585A | ||||
| JP2003504605A | ||||
| JP2003272535A | ||||
| JP2012242381A | ||||
| JP2013148478A |
Attorney, Agent or Firm:
Satoshi Takaya
Keisuke Matsuyama
Tsuyoshi Makino
Keisuke Matsuyama
Tsuyoshi Makino