Title:
A manufacturing method of a photoelectric conversion device
Document Type and Number:
Japanese Patent JP5964713
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce deterioration in photoelectric conversion efficiency of a photoelectric conversion device.SOLUTION: A method of manufacturing a photoelectric conversion device according to one embodiment of the present invention comprises a photoelectric conversion layer forming process of forming a photoelectric conversion layer 3 on a substrate 1, and a transparent electrode forming process of forming a transparent electrode 41 on the photoelectric conversion layer 3. The transparent electrode forming process comprises a moisture supply step of supplying moisture onto the photoelectric conversion layer 3, a heating step of raising the temperature of the substrate 1 to a temperature at which the transparent electrode 41 is to be deposited, and a deposition step of depositing the transparent electrode 41 on the photoelectric conversion layer 3 supplied with the moisture by reacting an alkylzinc-containing compound gas, a dopant-containing compound gas, and water vapor after the heating step. The moisture supply step is performed simultaneously with or before the heating step.
Inventors:
Tokuhiko Matsushima
Yuko Yokota
Shinya Ishikawa
Yousuke Inomata
Yuko Yokota
Shinya Ishikawa
Yousuke Inomata
Application Number:
JP2012218319A
Publication Date:
August 03, 2016
Filing Date:
September 28, 2012
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L31/0749; H01L31/18
Domestic Patent References:
| JP2006203022A |
Foreign References:
| WO2009069582A1 | ||||
| WO2006077986A1 |