A manufacturing method of a semiconductor light emitting element

Title:

A manufacturing method of a semiconductor light emitting element

Document Type and Number:

Japanese Patent JP5944301

Kind Code:

B2

Inventors:

Naoji Sugiyama
Taisuke Sato
Kotaro Zaimitsu
Junpei Tajima
Tokiki Hikosaka
Yoshiyuki Harada
Manabu Yoshida
Shinya Nunogami

Application Number:

JP2012253356A

Publication Date:

July 05, 2016

Filing Date:

November 19, 2012

Export Citation:

Assignee:

Toshiba Corporation

International Classes:

H01L33/32; H01L21/205; H01L33/20; H01L33/22

Domestic Patent References:

Foreign References:

WO2006120908A1

Attorney, Agent or Firm:

Masahiko Hinataji

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