Title:
Observation method using a charged particle beam device and a charged particle beam device
Document Type and Number:
Japanese Patent JP6316453
Kind Code:
B2
Inventors:
Hiroyuki Suzuki
Yasuyuki Momoi
Nobuyuki Maki
Yasuyuki Momoi
Nobuyuki Maki
Application Number:
JP2016562168A
Publication Date:
April 25, 2018
Filing Date:
December 05, 2014
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/20; H01J37/22; H01J37/244; H01J37/28
Domestic Patent References:
| JP5672464U | ||||
| JP59150159U | ||||
| JP322352U | ||||
| JP4223034A | ||||
| JP2005197136A | ||||
| JP2010182679A | ||||
| JP201248819A | ||||
| JP2012186024A | ||||
| JP2014225352A |
Attorney, Agent or Firm:
Hiraki International Patent Office
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