Title:
An oscillating element, a vibrator, an oscillator, electronic equipment, and a mobile
Document Type and Number:
Japanese Patent JP6051885
Kind Code:
B2
Abstract:
A resonator element has a piezoelectric substrate including a vibration section and a thick section having a thickness which is thicker than that of the vibration section, and a pair of excitation electrodes provided on a surface and a back surface of the vibration section. In addition, the thick section has a second thick section provided along a second outer edge of the vibration section. The second thick section has an outer edge section intersecting with both axes of an X axis and a Z′ axis in an end portion opposite to the fixing section in a plan view of the resonator element.
Inventors:
Naohisa Obata
Application Number:
JP2013007912A
Publication Date:
December 27, 2016
Filing Date:
January 18, 2013
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H03H9/19; H01L41/09; H01L41/18; H03H9/10
Domestic Patent References:
| JP2009164824A | ||||
| JP2012253630A | ||||
| JP2007158566A | ||||
| JP2002033640A | ||||
| JP2002198772A | ||||
| JP2003309445A | ||||
| JP2007174562A | ||||
| JP2012186639A |
Foreign References:
| US20140292437 | ||||
| US20090167117 | ||||
| US20120306321 | ||||
| US20140292434 |
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi