Title:
A particle film laminating device and a particle film laminating method using this
Document Type and Number:
Japanese Patent JP5940335
Kind Code:
B2
Abstract:
A particulate film laminating system (1) includes: a nanoparticle generating chamber (2) in which nanoparticles (12) of a metal material (9) are generated; a nanofiber generating chamber (3) in which nanofibers (13) of a resin material (11) are generated; a laminating chamber (4) in which the nanoparticles (12) and the nanofibers (13) are film-formed and laminated on a substrate (18); a nanoparticle film-forming region (15) configured such that the nanoparticles (12) are film-formed in the laminating chamber (4); a nanofiber film-forming region (16) configured such that the nanofibers (13) are film-formed in the laminating chamber (4); a moving unit (17) which moves the substrate (18) between the nanoparticle film-forming region (15) and the nanofiber film-forming region (16); an exhaust unit (5) which exhausts the laminating chamber (4); and a coolant-gas introduction unit (8) which introduces coolant gas into each of the nanoparticle generating chamber (2) and the nanofiber generating chamber (3).
Inventors:
Naoki Uchiyama
Tomomi Kanai
Tomomi Kanai
Application Number:
JP2012069775A
Publication Date:
June 29, 2016
Filing Date:
March 26, 2012
Export Citation:
Assignee:
Atsumi Tech Co., Ltd.
International Classes:
C23C14/06
Domestic Patent References:
| JP10278171A | ||||
| JP2000297361A |
Foreign References:
| WO2006019144A1 |
Other References:
B.L.Halpern,Jet Vapor Deposition of Single and Multicomponent Thin Films,Metal Finishing,1992年,37-41
Attorney, Agent or Firm:
Koji Nagato
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