Title:
PATTERN DRAWING DEVICE, AND PATTERN DRAWING METHOD
Document Type and Number:
Japanese Patent JP2016206636
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a pattern drawing device that repeatedly scans a drawing beam projected on an object to be irradiated by rotating a rotary polygon mirror to draw a predetermined pattern on an object to be irradiated.SOLUTION: A pattern drawing device comprises: an origin detection part 60 which generates an origin signal when it is detected that a second reflection surface RPb reflecting a drawing beam LB1, which is different from a first reflection surface RPa, out of a plurality of reflection surfaces RP of a rotary polygon mirror PM is at a predetermined angular position; and a controller which instructs drawing start by the drawing beam LB1 at predetermined delayed timing from generation of the origin signal by using a predetermined time determined by rotational speed of the rotary polygon mirror PM from a point where the origin signal is generated until the second reflection surface RPb becomes the first reflection surface RPa as a reference.SELECTED DRAWING: Figure 8
Inventors:
KATO MASANORI
Application Number:
JP2015179367A
Publication Date:
December 08, 2016
Filing Date:
September 11, 2015
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; G02B26/12; G03F7/24
Domestic Patent References:
| JP2016177251A | 2016-10-06 | |||
| JPH0545596A | 1993-02-23 | |||
| JPH10270326A | 1998-10-09 | |||
| JPH0752458A | 1995-02-28 | |||
| JP2006120774A | 2006-05-11 | |||
| JP2016152758A | 2016-08-22 |
Foreign References:
| US6396561B1 | 2002-05-28 |
Attorney, Agent or Firm:
Takehiro Chiba
Toshiyuki Miyadera
Takayuki Chima
Shuji Ouchi
Yasuharu Nakasone
Shiro Sakai
Toru Sekiguchi
Toshiyuki Miyadera
Takayuki Chima
Shuji Ouchi
Yasuharu Nakasone
Shiro Sakai
Toru Sekiguchi
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