Title:
感光性接着剤組成物、これを用いた感光性エレメント、レジストパターンの形成方法及び被接着部材の接着方法
Document Type and Number:
Japanese Patent JP5224121
Kind Code:
B2
Inventors:
Yasuhiro Seri
Application Number:
JP2008296797A
Publication Date:
July 03, 2013
Filing Date:
November 20, 2008
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
G03F7/037; C08G73/22; C09J4/00; C09J5/06; C09J11/06; C09J163/00; C09J179/04; G03F7/004; G03F7/075; G03F7/40; H01L21/027
Domestic Patent References:
| JP2004133435A | ||||
| JP2008033159A | ||||
| JP2003287889A | ||||
| JP2008088403A | ||||
| JP2002258485A |