Title:
A piezoelectric element and a light scanning apparatus
Document Type and Number:
Japanese Patent JP6233164
Kind Code:
B2
Abstract:
A piezoelectric element includes a first electrode having a film shape and provided on a base portion, a second electrode having a film shape and opposed to the first electrode on an opposite side of the first electrode from the base portion, a piezoelectric film interposed between the first electrode and the second electrode and partially covered with the second electrode, and an insulation film covering the second electrode and the piezoelectric film with extending over at least a part of an outer edge of the second electrode. The insulation film may cover a whole of the outer edge of the second electrode without covering an inner region of the second electrode. Accordingly, a withstand voltage of the piezoelectric film can be increased.
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Inventors:
Akira Wada
Noriyuki Matsushita
Noriyuki Matsushita
Application Number:
JP2014083794A
Publication Date:
November 22, 2017
Filing Date:
April 15, 2014
Export Citation:
Assignee:
株式会社デンソー
International Classes:
H01L41/053; H01L41/09; H01L41/23; H01L41/332
Domestic Patent References:
| JP2006332730A | ||||
| JP2009081347A | ||||
| JP2010118641A | ||||
| JP2013110180A | ||||
| JP2012178558A | ||||
| JP2009218567A | ||||
| JP2010214634A | ||||
| JP2009086050A |
Foreign References:
| US20090085443 | ||||
| US20100097431 |
Attorney, Agent or Firm:
Nagoya International Patent Service Corporation
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