Title:
POROUS CHUCK TABLE
Document Type and Number:
Japanese Patent JP2022142511
Kind Code:
A
Abstract:
To provide a porous chuck table capable of suppressing liquid from remaining on a retaining surface.SOLUTION: A porous chuck table 1 includes a porous plate 2 forming a holding surface 21, and a base 3 which has a suction path 35 communicating with a suction source 5 and applies negative pressure to a porous plate 2 fitted in a recess 33. The porous plate 2 includes an aggregate, a bond that fixes the aggregate, and a pore formed in a gap between the aggregate and the bond. The aggregate is composed of main coarse grains with a grain size of F80 to F100 and sub coarse grains of F150 to F220 specified in JISR6000-1, and the ratio of the main coarse grains to the sub-coarse grains is 1:3 to 1:10. The pores formed by the sub-coarse grains absorb the liquid adhering to the holding surface by capillary action, and the pores formed by the main coarse grains ensure breathability.SELECTED DRAWING: Figure 3
Inventors:
UMAJI RYOGO
Application Number:
JP2021042706A
Publication Date:
September 30, 2022
Filing Date:
March 16, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/683
Attorney, Agent or Firm:
Sakai International Patent Office