Title:
加工装置
Document Type and Number:
Japanese Patent JP7126857
Kind Code:
B2
Abstract:
To provide a processing device capable of suppressing rusting caused by processing waste.SOLUTION: A cutting device 1 to be a processing device includes: a chuck table 10 which holds a workpiece including a magnetic body; a cutting unit 20 which cuts a workpiece held by the chuck table 10 by a cutting blade 21; a nozzle 24 which supplies processing liquid to the cutting blade 21; and a water case 70 which has a drain port 71 which receives the processing liquid including processing waste of the workpiece and drains the processing liquid. The water case 70 has a processing waste capturing unit 80 which is detachably installed along the inside which is brought into contact with the processing liquid and captures processing waste including the magnetic body. The processing waste capturing unit 80 has a body section 81 in which a magnet is installed and a cover section 82 which covers the surface of the body section 81 and from which the body section 81 is detachable. Processing waste including the magnetic body is attracted to the surface of the cover section 82 by magnetic force of the body section 81.SELECTED DRAWING: Figure 1
Inventors:
Ryogo Umaji
David El Dolphy Jr.
David El Dolphy Jr.
Application Number:
JP2018094001A
Publication Date:
August 29, 2022
Filing Date:
May 15, 2018
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B55/12; B23Q11/00; B24B7/04; B24B27/06; H01L21/301; H01L21/304
Domestic Patent References:
| JP2016215300A | ||||
| JP57008073A | ||||
| JP57043943U | ||||
| JP10100039A | ||||
| JP56171143U |
Foreign References:
| KR1020100044364A | ||||
| US20180126506 |
Attorney, Agent or Firm:
Sakai International Patent Office